Equipment

Semiconductor

	Single Batch Cleaning System
	For both 5,6 inch cassetteless process Unitization of the frame improved the efficiency of the restoration at the worksite and shortened the time for a major remodeling such as the configuration of the device.
	Single Wafer Cleaning System
	High uniformity/Promote the low-emission This Production model provides new wet-process replacing RCA cleaning system with the high temperature heating, heavy exhaust, and massive chemical consumption.
	Brushing Scrub Cleaning System
	Equipped with a self-detect function of extrusion pressure It provides a high removal efficiency of particles by using this system before the receiving cleaning, resist coating, or CVD and after the deposition such as sputter.
	Batch Type Oxide film Etching System
	4,5,6 inch wafers/Process 1 patch for every 50 pieces/Rotary dry (automatic balancing function)
	Wafer ID Recognition Unit
	This system identifies/defines a specific ID marked on a wafer.
	Chemical Concentration Monitoring System
	System to be used to measure the chemistry concentration of processing solution used during the semiconductor cleaning process. This achieves concentration monitoring and control.

LCD

	Flat-Panel Cleaning System
	Advancement of Technology of Ultrasonic air and process yield This system provides dry cleaning of the surface (both sides) of various flat-panel discs such as LCD Glass (Color filter) and PDP Glass. Moreover, the operation is done without any contact with Glass, and it is possible to remove particles of a few microns in size.
	Unpacking Station
	Interplant transportation of LSD Glass needs packaging boxes such as special PP cases. During the process, Glass should be put into those cases and loaded on a conveyor one at a time to be transferred to the downstream device. This Unpacking station does the interchanging automatically.
	Transcriptional Laser Marker
	SEFATEC Original Transcriptional Marking The conventional Marking methods as denudation or printing had been factors of generating particles. The transcriptional Laser Marker has been developed to restrain particles.
	Visual Inspection Table
	Visual inspection table with smooth operation The external of Glass can be inspected visually for any dust, crack, or unevenness by using Green lamp, Sodium lamp, fluorescent, and etc. Operators need to load Glass by hands. By enlarging the image using a CCD camera, it provides more accurate inspections.
	Inline Visual Inspection
	Compatible to Advanced large glass Laborsaving by Automatic transfer system This inspection stage gives external visual checks of Glass substrate that is loaded automatically for any dust, crack, unevenness, etc by green lamp, sodium lamp, or fluorescent.
	Packing Station
	Compatible to Advanced large glass With this unloader, it is possible to store Glass transferred from the upstream device into PP case one at a time. Packing the PP case with plastic and banding it with PP bands are also available. This is the essential device for an upsizing advanced Glass.

Image

	Auto-inspection System for characteristics(Type 1)
	System to be used to test the record/replay characteristics of the magnetic-head.
	Auto-inspection System for characteristics(Type 2)
	System to be used to test the record/replay characteristics of the magnetic-head.
	Polisher prior to GD Recognition(Type 1)
	System to be used to measure and polish the gap depth of the magnetic-head by the submicron.
	Polisher prior to GD Recognition(Type 2)
	System to be used to measure and polish the gap depth of the magnetic-head by the submicron.
	Chip Inspection System
	System to be used to inspect the size of the magnetic-head chip.
	All-in-one Front polisher
	System to be used to measure and polish the gap depth of the magnetic-head by the submicron.
	Interference fringe Inspection System
	System to be used to inspect and classify the 3-D shape of the part of the magnetic-head to touch with the tape.
	Azimuth Inspection System
	System to be used to measure the gap angle of the magnetic-head with high degree of accuracy and classify.
	Inspection System for azimuth/jut/index
	System to be used to measure the size of each parts of the magnetic-head cylinder.
	Rank Classifier
	System to be used to measure the gap depth of the magnetic-head by the submicron and make demarcations according to rank.
	Interference fringes Inspection Microscope Unit
	System to be used to inspect the 3-D shape of the part of the magnetic-head to touch with the tape.

General

	Laser Marker
	Marking System using YAG laser.
	VsVn Measuring System
	System to be used to measure and inspect the electromotive force and noise of the UV sensor.
	Equipment for assessing purified water module
	System to be used to assess the performance of the Gas dissolving module/It measures the concentration of CO2 in purified water.
	UV Curing System
	Curing oven for ultraviolet cure resin.
	Plate thickness gage
	System to inspect the thickness of the plate device.
	Transfer system for characteristic test
	Loader/Unloader unit of Test System.
	Wrapping System for block
	System to be used to wrap the surface of the Magnetic　head　block.
	Remote Focusing System
	Unit to be used to operate the focus knob of the microscope by remote control.